1. 1)梶原優介 ; 精密工学会誌, 87, (9), 721(2021).
2. 2)T. Ueda, Z. An, K. Hirakawa, S. Komiyama ; J. Appl. Phys., 103, 093109(2008).
3. 3)K. Joulain, J.-P. Mulet, F. Marquier, R. Carminati, J.-J. Greffet ; Surf. Sci. Reports, 57, 59(2005).
4. 4)A. Pasquini, G. B. Picotto, M. Pisani ; Scanning Probe Microscopy: Characterization, Nanofabrication and Device Application of Functional Materials, 186, 357(2005).
5. 5)H. Nakajima, K.-T. Lin, R. Sakuma, F. Kimura, Y. Kajihara ; 18th International Conference on Precision Engineering, D-1-7,(2020).