Latest Issue of Physical Vaper Deposition
Author:
Affiliation:
1. Earth Tech. Ltd.
2. Nagoya University
Publisher
The Surface Finishing Society of Japan
Subject
General Engineering
Link
https://www.jstage.jst.go.jp/article/sfj/68/12/68_654/_pdf
Reference3 articles.
1. Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique
2. Particle Transport Process During Sputter Deposition Process in the Pressure Range of 2-20 Pa.
3. Investigation of composition uniformity of MoSix sputtering films based on measurement of angular distribution of sputtered atoms
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Nanocrystalline Thick Coating Films Deposited by Supersonic Free-Jet PVD;Journal of The Surface Finishing Society of Japan;2018-11-01
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