Application of Electrolyzed Sulfuric Acid for Cleaning Silicon Wafers
Author:
Affiliation:
1. Kurita Water Industries Ltd.
Publisher
The Surface Finishing Society of Japan
Subject
General Engineering
Link
https://www.jstage.jst.go.jp/article/sfj/67/8/67_421/_pdf
Reference4 articles.
1. Study on Resist Removal Using Electrolyzed Sulfuric Acid Solution in Comparison with SPM
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1. Continuous carbon fiber recycling technology using the electrolytic sulfuric acid method;Journal of Composite Materials;2024-03-06
2. Etching Technology for ABS Resin Using Electrolyzed Sulfuric Acid;Journal of The Surface Finishing Society of Japan;2020-12-01
3. Environmentally Friendly Plating Pretreatment for ABS Plastic Using Electrolyzed Sulfuric Acid;Transactions of the Materials Research Society of Japan;2018-12-01
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