Author:
KOJIMA Hiroyasu,SAITO Nagahiro,TAKAI Osamu
Publisher
The Surface Finishing Society of Japan
Reference10 articles.
1. 1) S. Takaki, K. Matsumoto, K. Suzuki ; Appl. Surf. Soc., 33/34, 919 (1988).
2. Electrical and optical properties of In2O3: Sn films prepared by activated reactive evaporation
3. Low resistance indium tin oxide films on large scale glass substrate
4. Large scale and low resistance ITO films formed at high deposition rates
5. 5) S. Takaki, Y. Shigesato, H. Harada, H. Kojima, T. Oyama, T. Haranoh ; SID Dig. Tech. Papers, 21, 76 (1990).