Three-dimensional micro/nano-scale structure fabricated by combination of non-volatile polymerizable RTIL and FIB irradiation-Reference-Cited by-同舟云学术

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Three-dimensional micro/nano-scale structure fabricated by combination of non-volatile polymerizable RTIL and FIB irradiation

Published:2014-01-16 Issue:1 Volume:4 Page:
ISSN:2045-2322
Container-title:Scientific Reports
language:en
Short-container-title:Sci Rep

Author:

Kuwabata Susumu,Minamimoto Hiro,Inoue Kosuke,Imanishi Akihito,Hosoya Ken,Uyama Hiroshi,Torimoto Tsukasa,Tsuda Tetsuya,Seki Shu

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

http://www.nature.com/articles/srep03722.pdf

Reference44 articles.

1. Hill, A. R. Uses of Fine Focused Ion Beam with High Current Density. Nature 218, 202–203 (1968).

2. Kern, D., Kuech, T. & Oprysko, M. Future Beam-Controlled Processing Technologies for Microelectronics. Science 241, 936–944 (1988).

3. Gamo, K. Focused Ion Beam Technology. Semicond. Sci. Technol. 8, 1118–1123 (1993).

4. Chen, H. H. et al. Shocks in Ion Sputtering Sharpen Steep Surface Features. Science 310, 294–297 (2005).

5. Valentine, J. et al. Three-dimensional optical metamaterial with a negative refractive index. Nature 455, 376–379 (2008).

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