A submicrometre silicon-on-insulator resonator for ultrasound detection
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
https://www.nature.com/articles/s41586-020-2685-y.pdf
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4. Zhang, C., Chen, S. L., Ling, T. & Guo, L. J. Review of imprinted polymer microrings as ultrasound detectors: design, fabrication, and characterization. IEEE Sens. J. 15, 3241–3248 (2015).
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