1. Brown, A. The role of voice in IoT applications (Strategy analytics, 2016).
2. Cohen, P. R. & Oviatt, S. L. The role of voice input for human-machine communication. Proc. Natl.Acad. Sci., USA 92, 9921–9927 (1995).
3. Martin, D. T. et al. A micromachined dual-backplate capacitive microphone for aeroacoustic measurements. J. Micro. S. 16, 1289–1302 (2007).
4. Goel, M. Electret sensors, filters and MEMS devices: new challenges in materials research. Curr. Sci. 85, 443–453 (2003).
5. Scheeper, P. R., Olthuis, W. & Bergveld, P. The design, fabrication, and testing of corrugated silicon nitride diaphragms. J. Micro. S 3, 36–42 (1994).