Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy,General Biochemistry, Genetics and Molecular Biology,General Chemistry
Link
http://www.nature.com/articles/s41467-017-02392-5.pdf
Reference46 articles.
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3. Horst, F., Green, W. M. J., Offrein, B. J. & Vlasov, Y. A. Silicon-on-insulator echelle grating WDM demultiplexers with two stigmatic points. IEEE Photonics Technol. Lett. 21, 1743–1745 (2009).
4. Momeni, B., Hosseini, E. S., Askari, M., Soltani, M. & Adibi, A. Integrated photonic crystal spectrometers for sensing applications. Opt. Commun. 282, 3168–3171 (2009).
5. Kyotoku, B. B. C., Chen, L. & Lipson, M. Sub-nm resolution cavity enhanced micro- spectrometer. Opt. Express 18, 102–107 (2010).
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