Superplastic nanoscale pore shaping by ion irradiation
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy,General Biochemistry, Genetics and Molecular Biology,General Chemistry
Link
http://www.nature.com/articles/s41467-018-03316-7.pdf
Reference51 articles.
1. Li, J. et al. Ion-beam sculpting at nanometre length scales. Nature 412, 166–169 (2001).
2. Krasheninnikov, A. V. & Nordlund, K. Ion and electron irradiation-induced effects in nanostructured materials. J. Appl. Phys. 107, 071301 (2010).
3. Johannes, A. et al. Anomalous plastic deformation and sputtering of ion irradiated silicon nanowires. Nano Lett. 15, 3800–3807 (2015).
4. Aramesh, M. Ion-Beam Sculpting of Nanowires. Phys. Status. Solidi. RRL 12, https://doi.org/10.1002/pssr.201700333 (2018).
5. George, H. B. et al. Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment. J. Appl. Phys. 108, 14310 (2010).
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