Nanomotor lithography

Author:

Li Jinxing,Gao Wei,Dong Renfeng,Pei Allen,Sattayasamitsathit Sirilak,Wang Joseph

Publisher

Springer Science and Business Media LLC

Subject

General Physics and Astronomy,General Biochemistry, Genetics and Molecular Biology,General Chemistry

Reference35 articles.

1. Ito, T. & Okazaki, S. Pushing the limits of lithography. Nature 406, 1027–1031 (2000).

2. Service, R. F. Optical lithography goes to extremes-and beyond. Science 293, 785–786 (2001).

3. Madou, M. J. Fundamentals of Microfabrication: the Science of Miniaturization 2nd edn CRC Press: Boca Raton, FL, USA, (2002).

4. Jeong, H. J. et al. The future of optical lithography. Solid State Technol. 37, 39–47 (1994).

5. Vieu, C. et al. Electron beam lithography: resolution limits and applications. Appl. Surf. Sci. 164, 111–117 (2000).

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