Electrostatic repulsive out-of-plane actuator using conductive substrate
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep35118.pdf
Reference34 articles.
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4. Sattler, R., Plotz, F., Fattinger, G. & Wachutka, G. Modeling of an electrostatic torsional actuator: Demonstrated with an RF MEMS switch. Sensors Actuators A 97-98, 337–346 (2002).
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