Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator-Reference-Cited by-同舟云学术

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Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Published:2019-02-19 Issue:1 Volume:9 Page:
ISSN:2045-2322
Container-title:Scientific Reports
language:en
Short-container-title:Sci Rep

Author:

Rodriguez Janna,Chandorkar Saurabh A.,Watson Christopher A.,Glaze Grant M.,Ahn C. H.,Ng Eldwin J.,Yang Yushi,Kenny Thomas W.

Funder

Defense Sciences Office, DARPA

U.S. Department of Energy

United States Department of Defense | Defense Advanced Research Projects Agency

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

http://www.nature.com/articles/s41598-019-38847-6.pdf

Reference45 articles.

1. Beek, J. T. M. V. & Puers, R. A review of the recent development of MEMS and crystal oscillators and their impacts on the frequency control products industry. In 2008 IEEE Ultrasonics Symposium (IUS), 694–704, http://ieeexplore.ieee.org/document/4803352/ , https://doi.org/10.1109/ULTSYM.2008.0167 (IEEE, 2018).

2. Shaeffer, D. K. MEMS inertial sensors: A tutorial overview. IEEE Commun. Mag. 51, 100–109, https://doi.org/10.1109/MCOM.2013.6495768 (2013).

3. Ayazi, F. & Najafi, K. A harpss polysilicon vibrating ring gyroscope. J. Microelectromechanical Syst. 10, 169–179, https://doi.org/10.1109/84.925732 (2001).

4. Nguyen, C. T. C. MEMS technology for timing and frequency control. IEEE Transactions on Ultrason. Ferroelectr. Freq. Control. 54, 251–270, https://doi.org/10.1109/TUFFC.2007.240 (2007).

5. Yasumura, K. Y. et al. Quality factors in micron- and submicron-thick cantilevers. J. Microelectromechanical Syst. 9, 117–125, https://doi.org/10.1109/84.825786 (2000).

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