Author:
Kim Na Kyoung,Kim Kanghyun,Jang Hansol,An Taechang,Shin Hyun-Joon,Kim Geon Hwee
Abstract
AbstractIn this report, we present the development of a copper nanofiber network-based microheater, designed for applications in electron microscopes, gas sensing, and cell culture platforms. The seed layer, essential for electroless deposition, was fabricated through the electrospinning of a palladium-contained polyvinylpyrrolidone solution followed by a heat treatment. This process minimized the contact resistance between nanofibers. We successfully fabricated a microheater with evenly distributed temperature by controlling the electrospinning time, heat treatment conditions, and electroless deposition time. We assessed the electrical and thermal characteristics of the microheater by examining the nanofiber density, sheet resistance, and transmittance. The microheater’s performance was evaluated by applying current, and we verified its capacity to heat up to a maximum of 350 °C. We further observed the microheater’s temperature distribution at varying current levels through an infrared camera. The entire manufacturing procedure takes place under normal pressure, eliminating the need for masking or etching processes. This renders the method easily adaptable to the mass production of microdevices. The method is expected to be applicable to various materials and sizes and is cost-effective compared to commercially produced microheaters developed through microelectromechanical system processes, which demand complex facilities and high cost.
Publisher
Springer Science and Business Media LLC
Reference62 articles.
1. Kwon, J. et al. Digitally patterned resistive micro heater as a platform for zinc oxide nanowire based micro sensor. Appl. Surf. Sci. 447, 1–7 (2018).
2. Dong, K. Y. et al. Enhanced H2S sensing characteristics of Pt doped SnO2 nanofibers sensors with micro heater. Sens. Actuators B Chem. 157, 154–161 (2011).
3. Mo, Y. et al. Micro-machined gas sensor array based on metal film micro-heater. Sens. Actuators B Chem. 79, 175–181 (2001).
4. Nieto, D., McGlynn, P., de la Fuente, M., Lopez-Lopez, R. & O’connor, G. M. Laser microfabrication of a microheater chip for cell culture outside a cell incubator. Colloids Surf. B Biointerfaces 154, 263–269 (2017).
5. Wu, J., Cao, W., Wen, W., Chang, D. C. & Sheng, P. Polydimethylsiloxane microfluidic chip with integrated microheater and thermal sensor. In Biomicrofluidics Vol. 3 (American Institute of Physics Inc, 2009).