Author:
Hopper Richard,Popa Daniel,Udrea Florin,Ali Syed Zeeshan,Stanley-Marbell Phillip
Abstract
AbstractWe present a miniaturised thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. An active sensing element, consisting of a MEMS microphone, is used to detect the target gas while a reference element is used for acoustic noise compensation. Compared to current photoacoustic gas sensors, our sensor requires neither the use of gas-encapsulated microphones, nor that of optical filters. In addition, it has all the benefits of CMOS technology, including production scalability, low cost and miniaturization. Here we demonstrate its application for CO$$_2$$
2
gas detection. The sensor could be used for gas leak detection, for example, in an industrial plant.
Funder
Engineering and Physical Sciences Research Council
Royal Society Equipment Grant
Alan Turing Institute Award
Publisher
Springer Science and Business Media LLC
Cited by
7 articles.
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