Nanofabrication on unconventional substrates using transferred hard masks
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep07802.pdf
Reference56 articles.
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5. Liddle, J. et al. Mask fabrication for projection electron-beam lithography incorporating the scalpel technique. J. Vac. Sci Technol. B 9, 3000–3004 (1991).
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