Author:
Ducrot Pierre-Henri,Dufour Isabelle,Ayela Cédric
Publisher
Springer Science and Business Media LLC
Reference20 articles.
1. Muralt, P. PZT thin films for microsensors and actuators: Where do we stand? IEEE Trans. Ultrason. Ferroelectr. Freq. Control 47, 903–915 (2000).
2. Shrout, T. R. & Zhang, S. J. Lead-free piezoelectric ceramics: Alternatives for PZT? J. Electroceram. 19, 111–124 (2007)
3. Kim, J. Y., Nandra, M. & Tai, Y. C. Cantilever actuated by piezoelectric Parylene-C. In IEEE 25th International Conference on Micro Electro Mechanical Systems, 1141–1144 (Paris, France, 2012).
4. Atkinsonm, G. M. et al. Piezoelectric polyimide tactile sensors. In 15th Biennial University/Government/Industry Microelectronics Symposium, 308–311 (2003).
5. Safari, A., Janas, V. F. & Bandyopadhyay, A. Development of fine-scale piezoelectric composites for transducers. AIChE J. 43, 2849–2856 (1997).
Cited by
95 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献