Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
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Published:2023-09-11
Issue:1
Volume:9
Page:
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ISSN:2055-7434
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Container-title:Microsystems & Nanoengineering
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language:en
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Short-container-title:Microsyst Nanoeng
Author:
Liang Xiaorui,Zhang Lei,Tan Qiulin,Cheng Wenhua,Hu Dan,Li Shuang,Jing Lin,Xiong Jijun
Abstract
AbstractThis paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS2@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25–700 °C, 0–700 kPa, and 10–98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the Δf-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics
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