Determining Chemically and Spatially Resolved Atomic Profile of Low Contrast Interface Structure with High Resolution

Author:

Nayak Maheswar,Pradhan P. C.,Lodha G. S.,Sokolov A.,Schäfers F.

Abstract

Abstract We present precise measurements of atomic distributions of low electron density contrast at a buried interface using soft x-ray resonant scattering. This approach allows one to construct chemically and spatially highly resolved atomic distribution profile upto several tens of nanometer in a non-destructive and quantitative manner. We demonstrate that the method is sensitive enough to resolve compositional differences of few atomic percent in nano-scaled layered structures of elements with poor electron density differences (0.05%). The present study near the edge of potential impurities in soft x-ray range for low-Z system will stimulate the activity in that field.

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

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