Maskless milling of diamond by a focused oxygen ion beam
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep08958.pdf
Reference36 articles.
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3. Wilbertz, C. et al. A focused gas-ion beam system for submun application. Nucl. Instrum. Methods Phys. Res., Sect. B 63, 120–124 (1992).
4. Borret, R., Jousten, K., Böhringer, K. & Kalbitzer, S. Long time current stability of a gas field ion source with a supertip. J. Phys. D: Appl. Phys. 21, 1835–1837 (2000).
5. Ward, B. W., Notte, J. A. & Economou, N. P. Helium ion microscope: A new tool for nanoscale microscopy and metrology. J. Vac. Sci. Technol., B 24, 2871–2874 (2006).
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