Nano-artifact metrics based on random collapse of resist

Author:

Matsumoto Tsutomu,Hoga Morihisa,Ohyagi Yasuyuki,Ishikawa Mikio,Naruse Makoto,Hanaki Kenta,Suzuki Ryosuke,Sekiguchi Daiki,Tate Naoya,Ohtsu Motoichi

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A study on sensitivity to an embedded nanostructure in a micrometer-channel-length Si MOSFET;Japanese Journal of Applied Physics;2024-03-01

2. A Lightweight Authentication Scheme with PE-Based Unclonable Label;2023 Asian Hardware Oriented Security and Trust Symposium (AsianHOST);2023-12-13

3. Nano-Artifact Metrics Chip Mounting Technology for Edge AI Device Security;2022 17th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT);2022-10-26

4. Dimension and process effects on the mechanical stability of ultra-small HSQ nanopillars;Journal of Nanoparticle Research;2021-11

5. Plastic deformation of synthetic quartz nanopillars by nanoindentation for multi-scale and multi-level security artefact metrics;Scientific Reports;2021-08-16

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