Hard-tip, soft-spring lithography
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/nature09697.pdf
Reference30 articles.
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4. Tseng, A. A., Notargiacomo, A. & Chen, T. P. Nanofabrication by scanning probe microscope lithography: A review. J. Vac. Sci. Technol. B 23, 877–894 (2005)
5. Rosa, L. G. & Liang, J. Atomic force microscope nanolithography: dip-pen nanoshaving, nanografting, tapping mode, electrochemical and thermal nanolithography. J. Phys. Condens. Matter 21, 483001 (2009)
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