Energy-filtered transmission electron microscopy of multilayers in semiconductors

Author:

LIU ,BOOTHROYD ,HUMPHREYS

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Reference14 articles.

1. Optimum imaging parameters for elemental mapping in an energy filtering transmission electron microscope;Berger;Optik,1993

2. Quantitative elemental mapping of materials by energy-filtered imaging;Crozier;Ultramicroscopy,1995

3. Egerton , R.F. 1997 Electron Energy-Loss Spectroscopy in the Electron Microscope

4. The effect of lens aberrations on the spatial resolution of an energy-filtered TEM image;Egerton;Micron,1997

5. EELS of ‘thick’ specimens;Egerton;Ultramicroscopy,1991

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