Синтез и хеморезистивная чувствительность к водороду наноструктурированных пленок CuO

Abstract

Highly porous CuO films up to 1 µm thick, consisting of vertically oriented nanowires ~50 nm in diameter, were synthesized by copper evaporation in a vacuum arc discharge in an argon/oxygen atmosphere followed by deposition on heated substrates. The phase composition and polycrystalline nature of the films were confirmed by X-ray diffraction. On the example of gaseous hydrogen H2, at a sensor operating temperature of 300 °C, the sensory characteristics of CuO films were studied. The qualitative mechanism of the effect of gas on the electrical characteristics of the nanostructured CuO film is described.