Neutron Reflectivity on Nanoporous Poly(Methylsilsesquioxane) Thin Films
Author:
Affiliation:
1. IBM T.J. Watson Research Center, Yorktown Heights, New York 10595
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm0207550
Reference18 articles.
1. High temperature polymer foams
2. Phase-Separated Inorganic-Organic Hybrids for Microelectronic Applications
3. Templating Nanoporosity in Thin-Film Dielectric Insulators
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