1. Department of Microsystems Engineering, University of Freiburg, IMTEK, Georges-Koehler-Allee
103, Freiburg, Germany
2. Fraunhofer Institute for Mechanics of Materials IWM, Woehlerstraße 11, Freiburg, Germany
3. Freiburger Materialforschungszentrum, University of Freiburg, FMF, Stefan-Meier-Straße
21, Freiburg, Germany