High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts-Reference-Cited by-同舟云学术

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High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Published:2011-03-29 Issue:4 Volume:11 Page:1568-1574
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Engstrom Daniel S.¹,Savu Veronica²,Zhu Xueni³,Bu Ian Y. Y.,Milne William I.³,Brugger Juergen²,Boggild Peter¹

Affiliation:

1. DTU Nanotech—Department of Micro- and Nanotechnology, Technical University of Denmark, 2800 Lyngby, Denmark

2. Microsystems Laboratory, Institute of Microengineering, Ecole Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland

3. Centre for Advanced Photonics and Electronics, Cambridge University, CB3 0FA, Cambridge, U.K.

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl104384b

Reference38 articles.

1. Advances in Scanning Force Microscopy for Dimensional Metrology

2. Advanced atomic force microscopy probes: Wear resistant designs

3. A carbon nanofibre scanning probe assembled using an electrothermal microgripper

4. Carbon nanotube tips for scanning probe microscopy: fabrication and high aspect ratio nanometrology

5. Large-Scale Fabrication of Carbon Nanotube Probe Tips for Atomic Force Microscopy Critical Dimension Imaging Applications

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