Structural and Chemical Studies of Metal–Organic Decomposed LaxCeyOz Thin Film as a Catalytic Oxide on 4H-SiC as a Function of Postdeposition Annealing Time
Author:
Affiliation:
1. Electronic Materials Research Group, School of Materials & Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia, 14300 Nibong Tebal, Seberang Perai Selatan, Penang, Malaysia
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/jp4025975
Reference60 articles.
1. Growth and structural characterization of cerium oxide thin films realized on Si(111) substrates by on-axis r.f. magnetron sputtering
2. Effects of Postdeposition Annealing in Argon Ambient on Metallorganic Decomposed CeO[sub 2] Gate Spin Coated on Silicon
3. Reactive sputter deposition of epitaxial (001) CeO2 on (001) Ge
4. Physical and electrical characteristics of metal-organic decomposed CeO2 gate spin-coated on 4H-SiC
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