Single-Source Chemical Vapor Deposition Growth of ZnO Thin Films Using Zn4O(CO2NEt2)6
Author:
Affiliation:
1. Surface Science & Technology, School of Chemical Sciences, The University of New South Wales, Sydney 2052, Australia
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm0204324
Reference33 articles.
1. Pressure and angle of incidence effects in reactive planar magnetron sputtered ZnO layers
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4. Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry
5. Chemical deposition method for metal chalcogenide thin films
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