High-Precision and Low-Damage Microchannel Construction via Magnetically Assisted Laser-Induced Plasma Ablation for Micro-Thermoelectric Devices-Reference-Cited by-同舟云学术

High-Precision and Low-Damage Microchannel Construction via Magnetically Assisted Laser-Induced Plasma Ablation for Micro-Thermoelectric Devices

Published:2022-10-10 Issue:41 Volume:14 Page:46756-46764
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Chen Shanghao¹,Zhu Wei²³^ORCID,Zhou Jie¹,Yu Yuedong¹,Xie Yujie¹,Deng Yuan²³^ORCID

Affiliation:

1. School of Materials Science and Engineering, Beihang University, Beijing100191, China

2. Research Institute for Frontier Science, Beihang University, Beijing100191, China

3. Key Laboratory of Intelligent Sensing Materials and Chip Integration Technology of Zhejiang Province (2021E10022), Hangzhou Innovation Institute of Beihang University, Hangzhou310052, China

Funder

Ministry of Science and Technology of the People's Republic of China

Natural Science Foundation of Beijing Municipality

National Natural Science Foundation of China

Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang

Zhejiang Provincial Key R&D Program of China

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.2c13844

Reference40 articles.

1. Next-generation thermoelectric cooling modules based on high-performance Mg3(Bi,Sb)2 material

2. Thermoelectric Devices: A Review of Devices, Architectures, and Contact Optimization

3. Integrated microthermoelectric coolers with rapid response time and high device reliability

4. Direct Laser-Patterned Micro-Supercapacitors from Paintable MoS2Films

5. A Wearable Body Condition Sensor System with Wireless Feedback Alarm Functions

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