Substrate-Independent Maskless Writing of Functionalized Microstructures Using CHic Chemistry and Digital Light Processing-Reference-Cited by-同舟云学术

Substrate-Independent Maskless Writing of Functionalized Microstructures Using CHic Chemistry and Digital Light Processing

Published:2022-10-26 Issue:44 Volume:14 Page:50288-50295
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Song Dan¹²,Kotz-Helmer Frederik²,Rapp Bastian¹²^ORCID,Rühe Jürgen¹²^ORCID

Affiliation:

1. livMatS @ Freiburg Center for Interactive Materials and Bioinspired Technologies (FIT), University of Freiburg, Georges-Köhler-Allee 105, 79110 Freiburg, Germany

2. Department of Microsystems Engineering (IMTEK), University of Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany

Funder

Carl-Zeiss-Stiftung

Deutsche Forschungsgemeinschaft

H2020 European Research Council

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.2c12000

Reference36 articles.

1. Photopolymerization

2. Review: Developments in micro/nanoscale fabrication by focused ion beams

3. Review of Surface Modification Technologies for Mid‐Infrared Antireflection Microstructures Fabrication

4. Fine-tuned grayscale optofluidic maskless lithography for three-dimensional freeform shape microstructure fabrication

5. Direct imaging of a digital-micromirror device for configurable microscopic optical potentials

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