Initial Polymerization Reactions in Particle-Forming Ar/He/C2H2 Plasmas Studied via Quantitative Mass Spectrometry
Author:
Affiliation:
1. Research Group Reactive Plasmas, Ruhr-Universität Bochum, 44780 Bochum, Germany
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp8042413
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1. Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane
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