1. Department of Bio-nano-Science and Engineering, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, Institute of Micro-Nano Science and Technology, Shanghai Jiao Tong University, 1954 Huashan Road, Shanghai 200030, People's Republic of China, Mechanical Engineering Department, University of California Riverside, 900 University Avenue, Riverside, California 92521, and Electrical Engineering Department, University of...