A New Positive-Type Photosensitive Alkaline-Developable Alicyclic Polyimide Based on Poly(amic acid silylester) as a Polyimide Precursor and Diazonaphthoquinone as a Photosensitive Compound
Author:
Affiliation:
1. Department of Organic & Polymeric Materials, Tokyo Institute of Technology, Ookayama 2-12-1, Meguro-ku, Tokyo 152-8552, Japan
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm0115362
Reference19 articles.
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2. Matsumoto, T.; Kurosaki, T.Macromolecules1997,30, 993
3. Optical Properties of Polyalicyclic Polyimides.
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