1. Corporate Research and Technology, Carl Zeiss AG, Carl-Zeiss-Promenade 10, 07745 Jena, Germany
2. Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States
3. University of Waterloo, Waterloo, Ontario, Canada
4. ZEISS Semiconductor Mask Solutions, Carl Zeiss SMT GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany