Assessing the Alignment Accuracy of State-of-the-Art Deterministic Fabrication Methods for Single Quantum Dot Devices

Author:

Madigawa Abdulmalik A.1,Donges Jan N.2,Gaál Benedek1,Li Shulun23,Jacobsen Martin Arentoft1,Liu Hanqing34,Dai Deyan34,Su Xiangbin34,Shang Xiangjun34,Ni Haiqiao34,Schall Johannes2,Rodt Sven2,Niu Zhichuan34ORCID,Gregersen Niels1ORCID,Reitzenstein Stephan2ORCID,Munkhbat Battulga1ORCID

Affiliation:

1. Department of Electrical and Photonics Engineering, Technical University of Denmark, Kgs. Lyngby 2800, Denmark

2. Institute für Festkörperphysik, Technische Universität Berlin, Berlin 10623, Germany

3. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

4. State Key Laboratory for Superlattice and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Funder

European Research Council

European Metrology Programme for Innovation and Research

National Key Research and Development Program of China

Special Project for Research and Development in Key areas of Guangdong Province

Danmarks Frie Forskningsfond

Deutsche Forschungsgemeinschaft

H2020 Marie Sklodowska-Curie Actions

Villum Fonden

Horizon 2020 Framework Programme

National Natural Science Foundation of China

Publisher

American Chemical Society (ACS)

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