1. State Key Laboratory of Optoelectronic Materials and Technologies, School of Materials, Sun Yat-sen University, Shenzhen, Guangdong 518107, China
2. Polytechnic Institute, Zhejiang University, Hangzhou, Zhejiang 310058, China
3. Zhengzhou Zhongnan JETE Superabrasives LTD, Zhengzhou, Henan 450001, China
4. Boyu (Tianjin) Semiconductor Materials Co., LTD, Tianjin, Hebei 301815, China