1. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, The Chinese Academy of Sciences, Shanghai 200083, China
2. State Key Laboratory of Surface Physics, Institute for Nanoelectronic Devices and Quantum Computing and Department of Physics, Fudan University, Shanghai 200433, China
3. Shanghai Qi Zhi Institute, 41th Floor, AI Tower, No. 701 Yunjin Road, Xuhui District, Shanghai 200232, China
4. Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 201210, China
5. School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
6. Department of Basic Science, The University of Tokyo, Komaba 3-8-1, Meguro-ku, Tokyo 153-8902, Japan
7. Terahertz Technology Research Center, National Institute of Information and Communications Technology, Nukui- Kitamachi 4-2-1, Koganei, Tokyo 184-8795, Japan