1. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment & School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China
2. Center of Super-Diamond and Advanced Films (COSDAF) & Department of Materials Science and Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China
3. School of Materials Science and Engineering, Georgia Institute of Technology, 711 Ferst Drive, Atlanta, Georgia 30332, United States