Anodic Imprint Lithography: Direct Imprinting of Single Crystalline GaAs with Anodic Stamp-Reference-Cited by-同舟云学术

Anodic Imprint Lithography: Direct Imprinting of Single Crystalline GaAs with Anodic Stamp

Published:2019-10-08 Issue:11 Volume:13 Page:13465-13473
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Kim Kyunghwan¹²,Ki Bugeun¹²,Choi Keorock¹²,Oh Jungwoo¹²^ORCID

Affiliation:

1. School of Integrated Technology, Yonsei University, 85 Songdogwahak-ro, Yeonsu-gu, Incheon 21983, Republic of Korea

2. Yonsei Institute of Convergence Technology, Yonsei University, 85 Songdogwahak-ro, Yeonsu-gu, Incheon 21983, Republic of Korea

Funder

Korea Electric Power Corporation

National Research Foundation of Korea

Institute for Information & Communication Technology Promotion

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsnano.9b07072

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4. Submicrometer Inversion-Type Enhancement-Mode InGaAs MOSFET With Atomic-Layer-Deposited $\hbox{Al}_{2}\hbox{O}_{3}$ as Gate Dielectric

5. III–V Complementary Metal–Oxide–Semiconductor Electronics on Silicon Substrates

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