Epidermis Microstructure Inspired Graphene Pressure Sensor with Random Distributed Spinosum for High Sensitivity and Large Linearity

Author:

Pang Yu1ORCID,Zhang Kunning1,Yang Zhen1ORCID,Jiang Song1,Ju Zhenyi1,Li Yuxing1,Wang Xuefeng1,Wang Danyang1,Jian Muqiang2,Zhang Yingying2ORCID,Liang Renrong1,Tian He1,Yang Yi1,Ren Tian-Ling1

Affiliation:

1. Institute of Microelectronics, Tsinghua University, Beijing, 100084, China

2. Department of Chemistry and Center for Nano and Micro Mechanics (CNMM), Tsinghua University, Beijing, 100084, China

Funder

Ministry of Science and Technology of the People's Republic of China

Ministry of Agriculture of the People's Republic of China

Tsinghua University

National Natural Science Foundation of China

Shenzhen Science, Technology and Innovation Commission

Beijing Innovation Center for Future Chip

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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