1. National Engineering Research Center of Electromagnetic Radiation Control Materials, University of Electronic Science and Technology of China, Chengdu 610054, China
2. Instituto de Micro y Nanotecnologı́a (IMN-CNM), CSIC (CEI UAM+CSIC), Isaac Newton, 8, Tres Cantos 28760, Madrid, Spain
3. College of Optoelectronic Technology, Chengdu University of Information Technology, Chengdu 610225, China
4. Dongguan ROE Technology Co., Ltd., Dongguan 523000, China
5. Hainan University, No. 58, Renmin Avenue, Haikou, Hainan Province 570228, China
6. Microsystem and Terahertz Research Center, China Academy of Engineering Physics, Chengdu 610200, China