Affiliation:
1. School of Integrated Circuits & Beijing National Research on Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
2. School of Aerospace Engineering, Tsinghua University, Beijing 100084, China
Funder
Ministry of Science and Technology of the People's Republic of China
Natural Science Foundation of Beijing Municipality
National Natural Science Foundation of China
Key Laboratory of Microelectronic Devices Integrated Technology, Chinese Academy of Sciences
Tsinghua-Foshan Innovation Special Fund
Daikin-Tsinghua Union-Program of ?The Etching Rates of Different Gases?
Guoqiang Institute, Tsinghua University
State Key Laboratory of New Ceramic and Fine Processing, Tsinghua University
Fok YingTong Education Foundation
Beijing National Research Center for Information Science and Technology Youth Innovation Fund
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Cited by
28 articles.
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