1. Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
2. National University of Singapore Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China
3. Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore 117608, Singapore
4. Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), Singapore 138634, Singapore
5. School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China
6. School of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, China
7. NUS Graduate School−Integrative Sciences and Engineering Program (ISEP), National University of Singapore, Singapore 119077, Singapore