Ion-Induced Localized Nanoscale Polymer Reflow for Three-Dimensional Self-Assembly
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455, United States
Funder
Division of Civil, Mechanical and Manufacturing Innovation
Division of Materials Research
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsnano.8b05283
Reference46 articles.
1. Reduction of Surface Scattering Loss in Polymer Microrings Using Thermal-Reflow Technique
2. Fabrication of Multiscale Gradient Polymer Patterns by Direct Molding and Spatially Controlled Reflow
3. Micro-ball lens array modeling and fabrication using thermal reflow in two polymer layers
4. High fill-factor microlens array mold insert fabrication using a thermal reflow process
5. Technique for monolithic fabrication of microlens arrays
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