1. Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
2. Frontier Science Center for Quantum Information, Beijing 100084, China
3. International Center for Nano-Optoelectronics, Tsinghua University, Beijing 100084, China
4. College of Integrated Circuits and Optoelectronic Chips, Shenzhen Technology University, Shenzhen 518118, China