A Sliding-Mode Triboelectric Nanogenerator with Chemical Group Grated Structure by Shadow Mask Reactive Ion Etching

Author:

Shang Wanyu12,Gu Guang Qin234,Yang Feng1,Zhao Lei1,Cheng Gang1ORCID,Du Zu-liang1,Wang Zhong Lin235ORCID

Affiliation:

1. Key Lab for Special Functional Materials, Ministry of Education, Henan University, Kaifeng 475004, China

2. Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 100083, China

3. CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology (NCNST), Beijing, 100190, China

4. University of Chinese Academy of Sciences, Beijing 100049, China

5. School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, United States

Funder

Ministry of Science and Technology of the People's Republic of China

National Natural Science Foundation of China

Chinese Academy of Sciences

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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