Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth

Author:

Myint Peco1ORCID,Woodward Jeffrey M.2,Wang Chenyu3ORCID,Zhang Xiaozhi4,Wiegart Lutz5ORCID,Fluerasu Andrei5,Headrick Randall L.4,Eddy Charles R.6ORCID,Ludwig Karl F.7

Affiliation:

1. X-ray Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Lemont, Illinois 60439, United States

2. Electronics Science and Technology Division, U.S. Naval Research Laboratory, 4555 Overlook Avenue SW, Washington, D.C. 20375, United States

3. Department of Physics, Boston University, 590 Commonwealth Avenue, Boston, Massachusetts 02215, United States

4. Department of Physics and Materials Science Program, University of Vermont, 82 University Place, Burlington, Vermont 05405, United States

5. National Synchrotron Light Source II, Brookhaven National Laboratory, 744 Ring Road, Upton, New York 11973, United States

6. Office of Naval Research Global, 86 Blenheim Crescent, West Ruislip, Middlesex HA4 7HB, U.K.

7. Department of Physics and Division of Materials Science and Engineering, Boston University, 590 Commonwealth Avenue, Boston, Massachusetts 02215, United States

Funder

Office of Naval Research

Office of Science

Division of Materials Research

Publisher

American Chemical Society (ACS)

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Local step-flow dynamics in thin film growth with desorption;Physical Review Materials;2024-03-20

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3