1. Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, 117576, Singapore
2. National University of Singapore Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China
3. Center for Sensors and MEMS, National University of Singapore, 4 Engineering Drive 3, 117576, Singapore
4. Hybrid Integrated Flexible Electronic Systems (HIFES), 5 Engineering Drive 1, 117608, Singapore
5. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai 200240, China
6. Jiangsu Provincial Key Laboratory of Advanced Robotics, School of Mechanical and Electric Engineering, Soochow University, Suzhou 215123, China