Synthesis and Characterization of Allyl(β-ketoiminato)palladium(II) Complexes: New Precursors for Chemical Vapor Deposition of Palladium Thin Films-Reference-Cited by-同舟云学术

Synthesis and Characterization of Allyl(β-ketoiminato)palladium(II) Complexes: New Precursors for Chemical Vapor Deposition of Palladium Thin Films

Published:1999-02-05 Issue:5 Volume:18 Page:864-869
ISSN:0276-7333
Container-title:Organometallics
language:en
Short-container-title:Organometallics

Author:

Tung Yeng-Lien¹,Tseng Wen-Cheng¹,Lee Chi-Young¹,Hsu Peng-Fu¹,Chi Yun¹,Peng Shie-Ming¹,Lee Gene-Hsiang¹

Affiliation:

1. Department of Chemistry and Material Research Center, National Tsing Hua University, Hsinchu 30043, Republic of China, and Department of Chemistry and Instrumentation Center, National Taiwan University, Taipei 10764, Taiwan, Republic of China

Publisher

American Chemical Society (ACS)

Subject

Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/om980728c

Reference31 articles.

1. Palladium Thin Films Grown by CVD from (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Palladium(II)

2. Catalyst Enhanced Chemical Vapor Deposition: Effects on Chemical Vapor Deposition Temperature and Film Purity

3. Intrazeolite large palladium clusters prepared by organometallic chemical vapour deposition

4. Vapor Phase Deposition of Palladium for Electroless Copper Plating

5. Thin palladium films prepared by metal-organic plasma-enhanced chemical vapour deposition

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