Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering-Reference-Cited by-同舟云学术

Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering

Published:2003-09-10 Issue:1 Volume:4 Page:147-156
ISSN:1528-7483
Container-title:Crystal Growth & Design
language:en
Short-container-title:Crystal Growth & Design

Author:

Mirica Eugenia¹,Kowach Glen¹,Evans Paul¹,Du Henry¹

Affiliation:

1. Department of Chemical, Biochemical and Materials Engineering, Stevens Institute of Technology, Hoboken, New Jersey 07030, Bell Laboratories, Lucent Technologies, Murray Hill, New Jersey 07974, and Materials Science Department, University of Wisconsin−Madison, Madison, Wisconsin 53706

Publisher

American Chemical Society (ACS)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cg025595j

Reference35 articles.

1. High quality ZnO layers with adjustable refractive indices for integrated optics applications

2. Deposition of Doped and Undoped ZnO Thin Films fo Gas Sensors

3. Textured ZnO Thin Films for Solar Cells Grown by a Two-step Process with the Atomic Layer Deposition Technique

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